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Aluminum nitride thin film and the piezoelectric thin film resonator using the same
Aluminum nitride thin film and the piezoelectric thin film resonator using the same
2005
eizi masu i
tetuo yamada
keigo nagao
Keywords:
Thin film
Aluminium
Resonator
Piezoelectricity
Nitride
Optoelectronics
Materials science
piezoelectric thin films
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