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High performance of SiC-MOS devices by POCl3 annealing
High performance of SiC-MOS devices by POCl3 annealing
2013
Yano Hiroshi
Hatayama Tomoaki
Fuyuki Takashi
Keywords:
Annealing (metallurgy)
Ceramic materials
Materials science
Composite material
Optoelectronics
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