Defect inspecting system
2000
Defect inspection system of the present invention includes: image acquisition means for acquiring two-dimensional image of the inspected object as a processing target in the manufacturing process; defect extraction means, means for image acquisition of the image acquired in accordance with specified parameters defect extraction algorithm to extract the defect; display means for displaying the image of the defect inspection of the defect of the object extracted by the extraction means; parameter adjusting means for adjusting the parameters of the above-mentioned drawbacks of the inspected object extraction degree; and adequacy determining means for determining based on information extracted by the defect detecting device is extracted defect the inspection object is qualified.
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