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Investigations to the deposition of thin YBa 2 Cu 3 O 7-x films by means of LPVD
Investigations to the deposition of thin YBa 2 Cu 3 O 7-x films by means of LPVD
1990
M. Panzner
G. Kessler
M. Bobeth
W. Pompe
S. Voellmar
H. Vinzelberg
S. Oswald
H. Mueller
M. Ermrich
B. Schoeneich
Keywords:
Electromagnetic radiation
surface coating
Semimetal
Diffusion (business)
Cuprate
Chemical engineering
Silicon
Deposition (chemistry)
Materials science
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