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Investigation on Focused Ion Beam Induced Damage on Nanoscale SRAM by Nanoprobing
Investigation on Focused Ion Beam Induced Damage on Nanoscale SRAM by Nanoprobing
2008
E. Hendarto
S.L. Toh
P.K. Tan
Y.W. Goh
J.L. Cai
Y.Z. Ma
Z.H. Mai
J. Lam
J. Sudijono
Keywords:
Nanoprobing
Nanoscopic scale
Static random-access memory
Focused ion beam
Materials science
Optoelectronics
Correction
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