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Thickness dependence of Y[sub 2]O[sub 3] films grown on an oxidized Si surface
Thickness dependence of Y[sub 2]O[sub 3] films grown on an oxidized Si surface
2001
Mu Hee Cho
Dong-Hyuk Ko
Y. G. Choi
In-Whan Lyo
Kuk-Hwan Jeong
Chung Nam Whang
Hang-Joon Kim
Do-Young Noh
Keywords:
Inorganic chemistry
Chemistry
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