Growth Properties of Carbon nanowall according to the Reaction Gas Ratio

Abstract - Graphite electrodes are used for secondary batteries, fuel cells, and super capacitors. Research is underway to increased the reaction area of graphite electrodes used carbon nanotube (CNT) and porous carbon. CNT is limited to device utilization in order to used a metal catalyst by lack of surface area to improve. In contrast carbon nanowall (CNW) is chemically very stable. So this paper, microwave plasma enhanced chemical vapor deposition (PECVD) system was used to grow carbon nanowall (CNW) on Si substrate with methane (CH 4 ) and hydrogen (H 2 ) gases. To find the growth properties of CNW according to the reaction gas ratio, we have changed the methane to hydrogen gas ratios (4:1, 2:1, 1:2, and 1:4). The vertical and surficial conditions of the grown CNW according to the gas ratios were characterized by a field emission scanning electron microscopy (FE-SEM) and Raman spectroscopy measurements showed structure variations. Key Words : Carbon nanowall (CNW), Reaction gas ratio, Growth properties, Microwave plasma enhanced chemical vapor deposition (PECVD)† Corresponding Author : Dept. of Electrical Engineering, Hanbat National University, KoreaE-mail : wschoi@hanbat.ac.kr*Hanbat National University, Korea** Yeoju Institute of Yechnology, Korea***Seoil University, Korea§Kangwon National University, Korea접수일자 : 2014년 2월 4일수정일자 : 2014년 9월 23일최종완료 : 2014년 10월 28일