Method for manufacturing a capacitor element

PROBLEM TO BE SOLVED: To provide a method for manufacturing a capacitor element that can substantially improve the dielectric constant of a dielectric material film, and also can control the deterioration of insulation characteristics. SOLUTION: A lower electrode layer 12, a dielectric material layer 13, and an upper electrode layer 14 are sequentially laminated on a substrate 11. The dielectric material layer 13 is formed by an aerosol deposition method, by utilizing a fine particle material of fine particle formed of a composite material of a dielectric material member and a conductive material. The fine particle material may adopt ceramic particles, covered at least at a part of the surface with the conductive material, conductive particles covered at least at a part of the surface with the ceramic material, and fine particles on which the conductive particle and ceramic particle are mutually deposited. The dielectric material layer 13 has a structure where the fine particle is solidified through the application of impacts, and a conductor 16b is dispersed at random and is connected electrically to each other inside a dielectric material 16a. COPYRIGHT: (C)2008,JPO&INPIT