Response of differential phase-sensitive microscope to a microstrip object

The method of the response interpretation of heterodyne differential phase microscope (HDPM) to submicron groove has been developed. The proposed procedure is based on an expansion of the averaged reflection coefficient in terms of object shape function moments. These moments define the major profile parameters (width, depth, etc.). Two types of a groove were considered: a groove with a geometric profile in homogeneous material and a phase groove in heterogeneous material. The influence of object parameters and a transfer function on the phase response of the microscope has been studied. It has been shown that the limiting lateral resolution may reach 0.1 micrometer if a signal to noise ratio (SNR) exceeds unity. The fluctuation limit of lateral resolution runs to 0.02 micrometer according to our estimation. The sizes of a 0.4 multiplied by 0.06 micrometer squared groove in magnetic video-recording head have been experimentally determined.© (1996) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.