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Effect of Platen Hardness on the Material Removal Rate of Sapphire Wafer in Single Side Lapping
Effect of Platen Hardness on the Material Removal Rate of Sapphire Wafer in Single Side Lapping
2013
Taekyung Lee
Hyoungjae Kim
Sangjik Lee
Doyeon Kim
Haedo Jeong
Keywords:
Lapping
Sapphire
Wafer
Metallurgy
Materials science
material removal
sapphire wafer
Correction
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