Precise main shaft rotation accuracy detecting device and method

2014 
The invention relates to a precise main shaft rotation accuracy detecting device and method, and belongs to the technical field of measuring precise main shaft rotation errors. The detecting device comprises an atomic force microscope (AFM), a plane sample, a manual two-dimensional adjusting platform, a two-dimensional electric displacement platform and a precise main shaft controller, wherein the AFM is used in cooperation with the plane sample to obtain a scored morphology graph, the plane sample is fixed to the upper portion of the manual two-dimensional adjusting platform, the bottom of the manual two-dimensional adjusting platform is connected with the upper end of a precise main shaft to be detected, and the lower end of the precise main shaft to be detected is connected with the two-dimensional electric displacement platform. The detecting device and method use the advantage of nanometer scoring machining and detecting integration of the AFM, it is unnecessary to adopt a datum part in the detecting process, operation is easy, the measurement accuracy can reach the nanometer order, radial and axial rotation errors of the precise main shaft can be detected at the same time, and the accuracy of the rotation errors of the precise main shaft is improved.
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