Film-forming apparatus, film-forming method and recording medium

The present invention provides a film forming apparatus, characterized by comprising: holding the container to be processed in the processing substrate; a first gas supply means, the processing is supplied to the inner container by a tert-butoxy group as the alkoxy ligand the first raw material gas composed of base metal; and a second gas supply means, the second processed feed gas fed into the container made of a silicon alkoxide to the raw material, supplying said first gas and said second gas supply means and said first means and said second feedstock gas phase preliminary reaction gas feed means connected to the preliminary reaction, the gas after the preliminary reaction of the first feedstock and said second feedstock gas supplied to the processing chamber.