Old Web
English
Sign In
Acemap
>
Paper
>
Large Scale Integration of Silicon Nanomechanical Resonators above Industrial CMOS Wafers
Large Scale Integration of Silicon Nanomechanical Resonators above Industrial CMOS Wafers
2016
W. Ludurczak
Guillaume Gourlat
Marc Gely
Gérard Billiot
J. Philippe
Patrick Villard
Gilles Sicard
Thomas Ernst
Sebastien Hentz
Keywords:
CMOS
Resonator
Electronic engineering
Wafer
Materials science
Silicon
Optoelectronics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
1
Citations
NaN
KQI
[]