Taking the next step on advanced HKMG SOI technologies — From 32nm PD SOI volume production to 28nm FD SOI and beyond

Within the semiconductor industry pure leading edge foundries serve a special mission by delivering state-of-the-art competitive logic performance with a strong focus on system-on-chip (SoC). Therefore they have to support a broad portfolio of different technology options on each node and GLOBALFOUNDRIES is an industry leader by representing this particular business model. It was formed out of AMD's manufacturing unit as well as Chartered Semiconductor Manufacturing. Both sides have a long time experience in leading-edge semiconductor manufacturing and technology capabilities one particular on silicon on insulator (SOI) based high performance microprocessors. To achieve the “high performance per watt” figure of merit technology elements like PD-SOI, strained-Si, an aggressive junction scaling as well as HKMG is needed together with an efficient multiple core- and power-efficient design. Those technology elements were developed and optimized for multiple generations beginning from an 180nm to a 32/28nm technology (Tab. 1).