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Growth and evaluation of N-polar AlN and AlGaN / AlN hetero-structures
Growth and evaluation of N-polar AlN and AlGaN / AlN hetero-structures
2020
Tadatoshi Ito
Kazuya Ataka
Ryota Sakamoto
Yongzhao Yao
Yukari Ishikawa
Narihito Okada
Kazuyuki Tadatomo
Keywords:
Materials science
High-electron-mobility transistor
Metalorganic vapour phase epitaxy
Optoelectronics
Polar
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