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Delamination of Crystalline Silicon Film from Substrate through Hydrogenation of Trap Layer
Delamination of Crystalline Silicon Film from Substrate through Hydrogenation of Trap Layer
2002
Alexander Y. Usenko
William N. Carr
Bo Chen
Keywords:
Substrate (chemistry)
Ion implantation
Delamination
Strained silicon
Analytical chemistry
Crystalline silicon
Nanocrystalline silicon
Wafer
Composite material
Materials science
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