Vacuum chamber with a shared pump

Embodiments of the present invention generally has a different pumping requirements, a vacuum processing chamber connected to the common pumping system through a single foreline. In one embodiment, the vacuum processing chamber comprises a high conductance pumping conduit and low conductance pumping conduit which is connected to a single high conductance foreline. In another embodiment, a plurality of unbalanced chamber group may be connected to a common pumping system by the final foreline.