X-ray radiographic testing apparatus and impurity detection method
2015
An X-ray radiographic inspection apparatus is provided with: an X-ray source configured to irradiate a sample with X-rays; a sample moving mechanism configured to move the sample continuously in a specific direction during the irradiation with the X-rays from the X-ray source; a TDI sensor, which is arranged on a side opposite the X-ray source arranged in between the sample and configured to detect the light transmitted through the sample X-rays, and a polycapillary, which is arranged between the X-ray source and the sample and configured to radially convert light emitted from X-ray source X-rays in an aligned parallel to the thickness direction of the sample parallel X-ray beam.
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI