Design and performance of an immersable low-temperature pressure gauge

A sensitive diaphragm-type pressure transducer, suitable for use at low temperature is described. This device was optimized for pressure up to 3.5 MPa. The external pressure deflects two CuBe disks, which form the electrodes of a capacitor. The transducer sensitivity at 3.43 MPa is about 25 pF/MPa. No hysteresis was detected within the accuracy of the piezoelectric pressure transducer used in the calibration procedure.