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Study of HfO2 high-k gate oxide for low-temperature poly-Si TFT
Study of HfO2 high-k gate oxide for low-temperature poly-Si TFT
2006
Ji-sim Jung
Jang-Yeon Kwon
Wenxu Xianyu
Takashi Noguchi
Seong-Hoon Jeong
Seok Won Jeong
Yonghan Roh
Keywords:
Condensed matter physics
Physics
Nuclear magnetic resonance
High-κ dielectric
Gate dielectric
Gate oxide
Thin-film transistor
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