Oxide-based thermoelectric micro-generators for ambiant energy harvesting

We aim to fabricate CaCoO-based thermoelectric micro-generator from the material growth to the prototype fabrication process. Pulsed-laser deposition is used to control the stoichiometry of the thermoelectric properties, which are evaluated by a homemade ZT-meter. Interdigit patterning through standard lithography and inkjet printing techniques are used for fabrication.