The chemical vapour deposition of epitaxial garnet films for magnetic bubble applications

Abstract A novel technique for the chemical vapour deposition of magnetic garnet films is described. Vaporised chlorides are normally used to transport metals to the reaction. In this work the chlorides are prepared and transported within the apparatus by the reaction of controlled supplies of chlorine with the metals. By this technique a large number of high quality films with compositions ranging from Y 3 Fe 5 O 12 to Gd 0.48 Y 2.52 - Ga 1.40 Fe 3.60 O 12 have been produced on (111) Gd 3 Ga 5 O 12 subsrates. Gd 3 Fe 5 O 12 has also been grown epitaxially on (111) Nd 3 Ga 5 O 12 subsrates.