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Technology of Self-Reinforced Silicon Nitride
Technology of Self-Reinforced Silicon Nitride
1994
and A J Pyzik
D.F. Carroll
Keywords:
Silicon nitride
Inorganic chemistry
LOCOS
Silicon on insulator
Hybrid silicon laser
Monocrystalline silicon
Nitride
Chemistry
Analytical chemistry
Optoelectronics
self reinforced
Correction
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