With a transparent conductive film substrate and a manufacturing method thereof

High C source haze ratio, excellent light transmittance, a transparent conductive film-coated substrate and a manufacturing method thereof having a high conductivity, provide a photoelectric conversion element using the substrate. Conductive layer is formed on a substrate, a transparent conductive film substrate with a thickness on the conductive layer and having a titanium oxide layer of 0.5 to 10 nm. Wherein the conductive layer is a tin oxide layer is preferably C source haze ratio of the transparent conductive film-coated substrate is 5 to 90%. Between the conductive layer and the substrate, the high refractive index layer from the substrate side, the low refractive index layer is preferably laminated in this order.