An approach to improve the precision of the grating interferometer measurement

A grating interferometer may be applied to measure the distance of equipment moving. However, some characteristics and process techniques of grating interferometer restrict the measurement precision to get improved. Based on an overall review of model and a method of subdivision and thorough analysis of the factors influencing measurement precision, this paper proposes an approach to improve measurement precision: 160 subdivision of MCS51 single chip micro computer. With the application to grating interferometer, this approach is proved to be more feasible and reliable by table-checking.