Silicon photonic optical phase arrays with apodized subwavelength gratings
2021
2x64 optical phased arrays with apodized subwavelength gratings were designed and fabricated to emit uniform light that is steered by applying phase shifts and wavelength tuning. The measured far field after phase error correction indicates clean output beams with 0.15° divergent angle along the array direction and >11 dB PSLL.
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