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Room temperature atomic layer deposition of Al2O3 and replication of butterfly wings for photovoltai
Room temperature atomic layer deposition of Al2O3 and replication of butterfly wings for photovoltai
2011
Xueyan Tang
Laurent A. Francis
Priscilla Simonis
M. Haslinger
Romain Delamare
Olivier Deschaume
Dominique Flandre
Pierre Defrance
Alain M. Jonas
Jean Pol Vigneron
Keywords:
Atomic layer epitaxy
Atomic layer deposition
Nanotechnology
Molecular physics
Chemistry
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