An optical member and a manufacturing method thereof for deep UV

2010 
The present invention provides a less deep ultraviolet optical member wavelength 250 nm, is substantially free of halogen element, is less than 10 ppm by weight up to OH group content, ODC (oxygen deficient type defects) and E Prime Center are both less than 1 × 10
    • Correction
    • Source
    • Cite
    • Save
    • Machine Reading By IdeaReader
    0
    References
    0
    Citations
    NaN
    KQI
    []