Substrate-Dependent Growth Behavior of Atomic-Layer-Deposited Zinc Oxide and Zinc Tin Oxide Thin Films for Thin-Film Transistor Applications

Jun Shik Kim,Younjin Jang,Sukin Kang,Yonghee Lee,Kwangmin Kim,Wha-Young Kim,Woongkyu Lee,Cheol-Seong Hwang

Substrate-Dependent Growth Behavior of Atomic-Layer-Deposited Zinc Oxide and Zinc Tin Oxide Thin Films for Thin-Film Transistor Applications

2020

Jun Shik Kim
Younjin Jang
Sukin Kang
Yonghee Lee
Kwangmin Kim
Wha-Young Kim
Woongkyu Lee
Cheol-Seong Hwang

The growth behaviors and electrical performances of semiconducting ZnO, SnO2, and (Zn,Sn)Ox thin films, grown by atomic layer deposition (ALD) using O3 as the oxygen source, were studied. A signifi...

Keywords:

Thin-film transistor
Substrate (chemistry)
zinc tin oxide
Chemical engineering
Zinc
Thin film
Materials science

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