Influence of phase transition induced by residual stress on ferroelectric properties of highly (100)-oriented Pb(Zr0.52Ti0.48)O3 thin films

Abstract Highly (1 0 0)-oriented polycrystalline Pb(Zr 0.52 Ti 0.48 )O 3 films with different thicknesses were fabricated on Pt/Ti/SiO 2 /Si substrate using typical sol–gel method. The study results indicate that, for the PZT film with composition near morphotropic phase boundary, tensile stress benefits the tetragonal-monoclinic phase transition and the phase transition is very sensitive to stress. The difference in the polarization behavior of the films with different thickness is considered as the result of the preferred orientation and the different monoclinic phase contents in the films.