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Manufacturing of micro optical device by Scanning Probe Microscope Lithography
Manufacturing of micro optical device by Scanning Probe Microscope Lithography
2017
Shuzo Yamashita
Sui Watanabe
Masakazu Ikai
Kohki Mukai
Keywords:
position control
Metamaterial
Materials science
Lithography
Scanning probe microscopy
Optoelectronics
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