Characterization of chemical bonding features at metal/GeO2 Interfaces by X-ray photoelectron spectroscopy

We have investigated chemical bonding features at thermally-grown GeO"2/Ge(100) and metals (Au and Pt)/GeO"2 interfaces by using high-resolution X-ray photoelectron spectroscopy (XPS). From the deconvolution of measured Ge3d"5"/"2 spectra taken after physical vapor deposition of ultrathin Au and Pt ultrathin films on thermally-grown GeO"2, we confirmed the formation of Ge sub-oxide components (GeO"x 0