200-W Operation of an Ion-Implanted Vertical-Cavity Surface-Emitting Laser Array

We have demonstrated a high-power 980-nm vertical-cavity surface-emitting laser diode (VCSEL) array with ion-implanted current apertures. The device was characterized on an exclusively developed water-cooled heat sink for the VCSEL array. A peak output power of over 200 W has been achieved under quasi-continuous-wave operation at a cooling water temperature of 10 °C. The VCSEL array consists of 635 emitters, which were defined by proton implantation and arranged in a closest packed arrangement with 175- \(\mu \) m-spacing in \(5~{\rm mm} \times 5\) mm square. The results provide a chance to the next step for a higher-power VCSEL array.