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Study of a Polycide (WSi2/Polysilicon) Emitter for a CMOS Compatible Self-aligned Bipolar Transistor
Study of a Polycide (WSi2/Polysilicon) Emitter for a CMOS Compatible Self-aligned Bipolar Transistor
1989
Giroult
Nouailhat
Gauneau
Keywords:
Annealing (metallurgy)
cmos compatible
Transistor
Bipolar junction transistor
Boron
Optoelectronics
Polycide
Common emitter
Materials science
Silicon
Correction
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