Mems device based on the display transmissive light valve and method of forming

The present invention relates to a display device based on MEMS transmissive light valve and method of forming, multilayer composite comprising providing a semiconductor substrate comprising a semiconductor underlayer, and a top layer a buried layer of a semiconductor; a light guide opening formed in the top semiconductor layer; and in the remaining portion of the semiconductor top layer of at least one MOS device prepared; interconnection layer is formed and an interlayer dielectric layer on said MOS device; connected to the conductive interconnect layer is formed on the light guide MEMS transmissive light valve port, said MEMS transmissive light valve is surrounded by the interlayer dielectric layer; forming a transparent surface of the back sheet on the interlayer dielectric layer, and removing the underlying semiconductor.