Straight-through type piezoelectric inkjet print head and manufacturing method thereof

2016 
The invention discloses a straight-through type piezoelectric inkjet print head and a manufacturing method thereof. The straight-through type piezoelectric inkjet print head is formed by a piezoelectric actuator, a vibrating plate and a cavity structure layer; and an ink inlet, cavity bodies and spray orifices are formed in the cavity structure layer. The piezoelectric actuator is formed by piezoelectric ceramic thin films, upper electrodes and lower electrodes, is formed on the surface of the vibrating plate, and corresponds to the cavity bodies so as to apply a drive force on each cavity body; and the vibrating plate is used for transferring the vibration of the piezoelectric actuator. According to the straight-through type piezoelectric inkjet print head, the cavity structure layer and the spray orifices are formed in a layer of silicon wafer, and the spray orifices are located on the side faces of the silicon wafer, i.e. axes of the spray orifices are coincided to length directions of the cavity bodies, so that the sectional area of the print head in a direction parallel to a print base is reduced, and multiple print heads can be favorably spliced; and meanwhile, the cavity bodies are manufactured on two faces of the cavity structure layer, and the number of the spray orifices is double increased, so that the straight-through type piezoelectric inkjet print head can be applied in a wide-format printer, and the work efficiency is improved.
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