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Development of Linear-Type High-Velocity Molecular-Beam Cell for Large-Area High-Speed Thin-Film Deposition
Development of Linear-Type High-Velocity Molecular-Beam Cell for Large-Area High-Speed Thin-Film Deposition
2019
Kota Ogino
Ryosuke Matsubara
Min-Cherl Jung
Hirotaka Kojima
Hiroaki Benten
Masakazu Nakamura
Keywords:
Molecular beam
Materials science
Optoelectronics
Roll-to-roll processing
Thin film
high velocity
development
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