Mapping matrices and weight function in high-precision EST of flatness by optical probe

As one of the valid means to perform non-contact high-precision measurements, many types of measuring sensors are developed by professor S. Kyono, which are based on laser optical triangular method and have many compound modes of displacement and angular displacement, such as one-point-one-dimension and one-point-2- dimension, and used in flatness measurement. Based on the uniform equations of 1-dimension and multi-dimension EST (Error Separation Techniques) and their mapping matrixes, which are proposed by the author, this paper expounds the same ultimate source of displacement and angular displacement in spite of their different forms. The above is based on the linear decompositions of flatness measurement equations on two directions of orthogonal coordinates. According to the theory, ten methods of flatness EST are investigated. And their mapping matrixes and weight functions are analyzed. At last their virtues, defects and their application situations are compared.© (2000) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.