Performance of the APS optical slope measuring system

Abstract An optical slope measuring system (OSMS) was recently brought into operation at the Advanced Photon Source of the Argonne National Laboratory. This system is equipped with a precision autocollimator and a very accurate mirror-based pentaprism on a scanning stage and kept in an environment-controlled enclosure. This system has the capability to measure precision optics with sub-microradian rms slope errors as documented with a series of tests demonstrating accuracy, stability, reliability and repeatability. Measurements of a flat mirror with 0.2 μrad rms slope error are presented which show that the variation of the slope profile measurements with the mirror setting at different locations along the scanning direction is only 60 nrad and the corresponding height error profile has 2 nm rms.