Polarized light irradiation apparatus and the polarized light irradiation method for the optical alignment for optical alignment

Disclosed is a device capable of performing a photo-alignment process with respect to the plate-like member, to provide an apparatus capable of realizing a high productivity. A radiation unit 1 is a polarized light irradiates the irradiation region R, returning the first second stage 21 on which the substrate S is mounted stage moving mechanism 3 is transported to the irradiation region R alternately. Between the first stage 21 and the irradiation region R located on the first substrate mounting position, min or more spaces L1 to substrate S passes through the irradiation region R of the second stage on 22 is secured, the second between the second stage 22 and the irradiation region R located on the substrate mounting position of the space L2 of the above amount of the substrate S on the first stage 21 passes through the irradiation area is secured. .The