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Capacitive VHF plasma simulation at atmospheric pressure by local field approximation method
Capacitive VHF plasma simulation at atmospheric pressure by local field approximation method
1997
Yasushi Oshikane
Katsuyoshi Endo
Toshihiko Kataoka
Masato Kawashima
Kohei Tamada
Shuichi Aimoto
osigane nei
endou katuyosi
kataoka tosihiko
kawasima masato
tamada kouhei
aimoto syuuiti
Keywords:
Local field
Computational physics
Plasma
Atmospheric pressure
Glow discharge
Capacitive sensing
Materials science
Computer simulation
Focused Impedance Measurement
helium plasma
Correction
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