Swept Laser Interferometric Interrogation
2009
A high-speed, swept-laser interferometric interrogation approach is introduced. Dynamic measurements of weak Fabry-Perot or Fizeau type interferometers with gap ranges of 50 um to 1 mm up to 70 Ksamples per second are demonstrated and discussed. Displacement resolution is < 1 pm/rt-Hz. This has application with MEMS and FPPI type sensors.
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