Vacuum device capable of integrating ultraviolet light chemistry and chemical vapor dry surface treatment

The invention discloses a vacuum device capable of integrating ultraviolet light chemistry and chemical vapor dry surface treatment, which consists of a vacuum chamber, an ultraviolet light source system, a vacuum pump system and a vacuum device control system, wherein the vacuum chamber consists of a high vacuum internal chamber and a low vacuum external chamber; an ultraviolet lamp light source is fixed on the top of the external chamber; a sample table with an adjustable height is arranged in the internal chamber; and a heating and water-cooling system is arranged outside the internal chamber. The invention also provides a using method of the vacuum device. The vacuum device is capable of accurately controlling the processes of the ultraviolet light chemistry and the chemical vapor dry reaction, so that materials, devices and the like can be effectively cleaned and modified; and the invention has important application value in the fields of materials and nanoscale optoelectronic devices.