Hybrid CMOSNCSEL Optoelectronic Modules

We report some investigations on vertical cavity surface mining laser (VCSEL) arrays and VCSEL based 2ptoelectronic smart photonic multiple chip modules :MCM), consisting of 1x16 vertical cady surface miming laser array and 16channel lasers driver 0.35 pm ZMOS circuit. The hybrid integrated multiple chip ~ldules based on VCSEL operate at more than 2GHz in 3dJ3 frequency bandwidth. ieywords VCSEL, CMOS, MCM, optoelectronic ntegration, smart pixels, optical interconnects ntroduction I he high density and high pexformance optoelectronic ~~tegrated circuit (OEIC) are expected to be used in ipucal interconnects massively parallel processors and Iptical switching networks of data communication, An Iptoelectronic -VU1 (OE-VLSI) circuit technology now dst for providing thousands of optical input and output n foundry-grade very large scale integration (VLSI) :Ikon CMOS circuitry. The technique provides a 11~th0d for optoelectronic integration of optical elements nd microelectronic VLSI silicon IC’s. The OE-VLSI lybrid integration offers the potential for both high speed nd high complexity. .‘ertical cavity surface emitting lasers (VCSELs) offer he great advantages over conventional edgeemitting mxs, such as extremely low threshold current, single angitudinal mode, especially surface emission laser with ’ery small beam divergence and simple fabrication in