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Porous Silicon Oxide Layer Formation by the Electrochemical Treatment of a Porous Silicon Layer
Porous Silicon Oxide Layer Formation by the Electrochemical Treatment of a Porous Silicon Layer
1990
Masao Yamana
Naoya Kashiwazaki
A. Kinoshita
Tomoyasu Nakano
Motokazu Yamamoto
Clifford W. Walton
Keywords:
Scanning electron microscope
Oxide
Thin film
Analytical chemistry
Porous silicon
Electrochemistry
Chemical composition
Oxide thin-film transistor
Inorganic compound
Inorganic chemistry
Chemistry
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