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Silicon Thinning using Ultra-Short Pulse Laser Ablation
Silicon Thinning using Ultra-Short Pulse Laser Ablation
2004
Felix Beaudoin
P. Perdu
C. Denardi
Romain Desplats
J. Lopez
M. Faucon
Keywords:
Optoelectronics
Laser ablation
Silicon
Thinning
ultra short pulse
Materials science
Correction
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