Old Web
English
Sign In
Acemap
>
Paper
>
Crystallinity of Al 2O 3 films deposited by metalorganic chemical vapor deposition
Crystallinity of Al 2O 3 films deposited by metalorganic chemical vapor deposition
2004
Siddhartha K. Pradhan
P.J. Reucroft
Yeonkyu Ko
Keywords:
Chemical vapor deposition
Hybrid physical-chemical vapor deposition
Metallurgy
Materials science
Crystallinity
Thin film
Deposition (phase transition)
Carbon film
Combustion chemical vapor deposition
Pulsed laser deposition
Inorganic chemistry
Correction
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]