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Nitriding Mechanism of Titanium Thin Films by Ion Implantation
Nitriding Mechanism of Titanium Thin Films by Ion Implantation
2006
Yoshitaka Kasukabe
Jianjun Wang
Tutomu Yamamura
Y. Fujino
Shunya Yamamoto
Masato Yoshikawa
Keywords:
Ion implantation
Thin film
Titanium
Titanium nitride
Nitriding
Metallurgy
Materials science
in situ transmission electron microscopy
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