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Synthesis and Evaluation of Novel PAGs for ArF Lithography
Synthesis and Evaluation of Novel PAGs for ArF Lithography
2004
Kunihiko Kodama
Kenichiro Sato
Shiro Tan
Fumiyuki Nishiyama
Tsukasa Yamanaka
Shinnichi Kanna
Hyou Takahashi
Yasumasa Kawabe
Makoto Momota
Tadayoshi Kokubo
Keywords:
Organic chemistry
Lithography
Materials science
line edge roughness
Correction
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