Old Web
English
Sign In
Acemap
>
Paper
>
Fabrication Issues in Combinatorial Synthesis of Metal Oxide Thin Film and Device Libraries
Fabrication Issues in Combinatorial Synthesis of Metal Oxide Thin Film and Device Libraries
1998
Ichiro Takeuchi
Hauyee Chang
Jason Tsong-li Wang
Young K. Yoo
Chuansi Gao
Peter G. Schultz
X.-D. Xiang
Rajeshwar P. Sharma
M. Downes
Thirumalai Venky Venkatesan
Keywords:
Thin film
Oxide
Physical vapor deposition
Atomic layer deposition
Nanotechnology
Combustion chemical vapor deposition
Layer by layer
Pulsed laser deposition
Composite material
Materials science
Metal
Correction
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]